Mass Flow Controllers with 20+ Gas Select Function
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DescriçãoThe FMA-2600A Series mass and volumetric flow controllers use the principle of differential pressure within a laminar flow field to determine and control mass flow rate. A laminar flow element (LFE) inside the meter forces the gas into laminar (streamlined) flow. Inside this region, the Poiseuille equation dictates that the volumetric flow rate be linearly related to the pressure drop. A differential pressure sensor is used to measure the pressure drop along a fixed distance of the LFE. This, along with the viscosity of the gas, is used to accurately determine the volumetric flow rate. Separate absolute temperature and pressure sensors are incorporated and correct the volumetric flow rate to a set of standard conditions. This standardized flow rate is commonly called the mass flow rate and is reported in units such as standard cubic feet per minute (SCFM) or standard liters per minute (SLM).